JPH0725618Y2 - 変位測定装置 - Google Patents
変位測定装置Info
- Publication number
- JPH0725618Y2 JPH0725618Y2 JP1988040318U JP4031888U JPH0725618Y2 JP H0725618 Y2 JPH0725618 Y2 JP H0725618Y2 JP 1988040318 U JP1988040318 U JP 1988040318U JP 4031888 U JP4031888 U JP 4031888U JP H0725618 Y2 JPH0725618 Y2 JP H0725618Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measurement
- measuring device
- image
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 title claims description 27
- 238000005259 measurement Methods 0.000 claims description 54
- 238000005286 illumination Methods 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 claims description 10
- 238000002834 transmittance Methods 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000006096 absorbing agent Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000011521 glass Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988040318U JPH0725618Y2 (ja) | 1988-03-29 | 1988-03-29 | 変位測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988040318U JPH0725618Y2 (ja) | 1988-03-29 | 1988-03-29 | 変位測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01144808U JPH01144808U (en]) | 1989-10-04 |
JPH0725618Y2 true JPH0725618Y2 (ja) | 1995-06-07 |
Family
ID=31266789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988040318U Expired - Lifetime JPH0725618Y2 (ja) | 1988-03-29 | 1988-03-29 | 変位測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0725618Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011106896A (ja) * | 2009-11-16 | 2011-06-02 | Mitsutoyo Corp | 非接触プローブ、及び測定機 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5276944A (en) * | 1975-12-23 | 1977-06-28 | Canon Inc | Optical filter |
JPH044167Y2 (en]) * | 1984-11-06 | 1992-02-07 |
-
1988
- 1988-03-29 JP JP1988040318U patent/JPH0725618Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01144808U (en]) | 1989-10-04 |
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